Microsoft Word - 107106-6464 IJET-IJENS
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چکیده
107106-6464 IJET-IJENS © December 2010 IJENS I J E N S Abstract— Capacitive cantilever-mass micro-machined accelerometers have attracted much interest for properties such as a simple structure and potentially high sensitivity. This paper presents the simulation of a low-g capacitive cantilever-mass micro-machined accelerometer model to gain the desirable magnitude of displacement and capacitance by the CoventorWare software. The device fabricating procedure is also described. The cantilever uses proof mass suspended between fixed rigid electrodes to produce differential capacitance. The model takes into account the effect of device geometry and agrees well with results obtained by analysis.
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